Proceedings Vol. 31 (2025)

ENGINEERING MECHANICS 2025
May 12 – 14, 2025, Medlov, Czech Republic
Copyright © 2025 Institute of Theoretical and Applied Mechanics of the Czech Academy of Sciences, Prague
ISBN 978-80-86246-99-4 (electronic)
ISSN 1805-8248 (printed)
ISSN 1805-8256 (electronic)
list of papers scientific commitee
pages 57 - 60, full text

The growing interest in microelectromechanical systems (MEMS) technologies is driving research in this area. One of the important elements used in MEMS technologies are micropumps. Most often, micropumps have an integrated membrane made of different materials that is directly affected by the excitation source. In this work, the membrane is integrated into the housing (made of the same material) and is separated from the excitation source. This reduces the complexity of production and the number of parts to be assembled. Finite element analysis has shown that this type of micropump works and can achieve a performance of 1.25 µl/s. In addition, it is planned to improve the geometry, mathematical model, and manufacturing technology of the micropump to increase the micropump performance.
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All papers were reviewed by members of the scientific committee.