Engineering Mechanics

International Conference

Proceedings Vol. 14 (2008)


ENGINEERING MECHANICS 2008

NATIONAL CONFERENCE WITH INTERNATIONAL PARTICIPATION
May 12 – 15, 2008, Svratka, Czech Republic
;
Editors: Vladimír Fuis and Michal Pásek

Copyright © 2008 Institute of Thermomechanics, Academy of Sciences of the Czech Republic, v.v.i., Prague

ISBN 978-80-87012-11-6 (printed)
ISSN 1805-8248 (printed)
ISSN 1805-8256 (electronic)

list of papers scientific commitee

USING COSMOS FLOWORKS TO DESIGN THE DIFFERENTIALLY PUMPED CHAMBER
Maxa J., Neděla V.
pages 156 - +9p., full text

Environmental scanning electron microscope creates new possibilities in the field of examination various types of specimens and their phases. The article analyses and compares the results of air pumping measurement for selected shapes of the differentially pumped chamber to create vacuum, using the Cosmos FloWorks system.


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