Proceedings Vol. 14 (2008)
ENGINEERING MECHANICS 2008
May 12 – 15, 2008, Svratka, Czech Republic
Copyright © 2008 Institute of Thermomechanics, Academy of Sciences of the Czech Republic, v.v.i., Prague
ISSN 1805-8248 (printed)
ISSN 1805-8256 (electronic)
list of papers scientific commitee
pages 156 - +9p., full text
Environmental scanning electron microscope creates new possibilities in the field of examination various types of specimens and their phases. The article analyses and compares the results of air pumping measurement for selected shapes of the differentially pumped chamber to create vacuum, using the Cosmos FloWorks system.
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