Proceedings Vol. 18 (2012)
ENGINEERING MECHANICS 2012
May 14 – 17, 2012, Svratka, Czech Republic
Copyright © 2012 Institute of Theoretical and Applied Mechanics, Academy of Sciences of the Czech Republic, v.v.i., Prague
ISBN 978-80-86246-40-6 (electronic)
ISSN 1805-8248 (printed)
ISSN 1805-8256 (electronic)
list of papers scientific commitee
pages 1435 - 1440, full text
This paper describes a microcompression test of thin Al - 1.5 wt. % Cu thin film deposited on Si substrate. Microcompression combines the sample preparation with the use of ion focused beam (FIB) with a compression test carried out using nanoindenter. Cylindrical specimens (pillars) were prepared using FIB. The diameter of pillars was about 1.3 µm and their height was about 2 µm (equal to the film thickness). Stress-strain curves of the thin film were obtained. The results depend on crystallographic orientation of pillar. The paper is focused to an attempt to determine as precisely as possible Young modulus of the film using experimental data and finite element modelling.
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All papers were reviewed by members of the scientific committee.
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