Engineering Mechanics

International Conference

Proceedings Vol. 9 (2003)


ENGINEERING MECHANICS 2003

NATIONAL CONFERENCE WITH INTERNATIONAL PARTICIPATION
May 11 – 15, 2003, Svratka, Czech Republic
;
Editors: Jiří Náprstek and Cyril Fischer

Copyright © 2003 Institute of Theoretical and Applied Mechanics, Academy of Sciences of the Czech Republic, v.v.i., Prague

ISBN 80-86246-18-3 (printed, Extended Abstracts)
ISSN 1805-8248 (printed)
ISSN 1805-8256 (electronic)

list of papers scientific commitee

Height profile measurement by means of white-light interferometry
Pavlíček P.
pages 240 - +6p., full text

White-light interferometer allows to measure the height profile of smooth as well as of rough surfaces. This feature renders white-light interferometry suitable for height profile measurement in technical practice. Unlike to classical interferometry, the ambiguity problem does not occur, even if the measurement range is greater than that corresponding to one interference fringe. Due to this unambiguity, the measurement range is theoretically unlimited; in practice it amounts to 20 - 50 mm. A very low measurement uncertainty (of about 1 um) is independent on the measurement range. The height profile is measured in the course of one measurement procedure on a surface area that amounts to 20 × 20 mm.


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